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Chapter Spatial Atomic Layer Deposition

JimÃ©nez, Carmen||Bellet, Daniel||Masse de la Huerta, CÃ©sar||MuÃ±oz-Rojas, David||Huong Nguyen, Viet

Chapter Spatial Atomic Layer Deposition

English[eng]

Subjects--Topical Terms:
chemical vapor deposition, spatial atomic layer deposition (SALD), atmospheric pressure, in-line processing, thin films, transparent conductive materials, fluid dynamics

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