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Piezoelectric MEMS

Ulrich Schmid (Ed.)||Michael Schneider (Ed.)

Piezoelectric MEMS

English[eng]

Subjects--Topical Terms:
Piezoelectric MEMS resonators||Piezoelectric materials||Acoustic MEMS devices||Surface acoustic wave devices||Smart electronics for piezoelectric devices and systems||Piezoelectric energy harvesting||Packaging of piezoelectric MEMS||Simulation and modeling of piezoelectric MEMS

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