@book{12456,
	author = {Jiménez, Carmen||Bellet, Daniel||Masse de la Huerta, César||Muñoz-Rojas, David||Huong Nguyen, Viet},
	title = {Chapter Spatial Atomic Layer Deposition},
	url = {https://library.oapen.org/bitstream/20.500.12657/49301/1/64743.pdf||https://library.oapen.org/bitstream/20.500.12657/49301/1/64743.pdf}
}