TY  - BOOK
AU  - Jiménez, Carmen||Bellet, Daniel||Masse de la Huerta, César||Muñoz-Rojas, David||Huong Nguyen, Viet
TI  - Chapter Spatial Atomic Layer Deposition
KW  - chemical vapor deposition, spatial atomic layer deposition (SALD), atmospheric pressure, in-line processing, thin films, transparent conductive materials, fluid dynamics
UR  - https://library.oapen.org/bitstream/20.500.12657/49301/1/64743.pdf||https://library.oapen.org/bitstream/20.500.12657/49301/1/64743.pdf
ER  -