Ulrich Schmid (Ed.)||Michael Schneider (Ed.) <br/><br/>
Piezoelectric MEMS 

<br/><br/><br/>English[eng] 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Piezoelectric MEMS resonators||Piezoelectric materials||Acoustic MEMS devices||Surface acoustic wave devices||Smart electronics for piezoelectric devices and systems||Piezoelectric energy harvesting||Packaging of piezoelectric MEMS||Simulation and modeling of piezoelectric MEMS