TY  - BOOK
AU  - Ulrich Schmid (Ed.)||Michael Schneider (Ed.)
TI  - Piezoelectric MEMS
KW  - Piezoelectric MEMS resonators||Piezoelectric materials||Acoustic MEMS devices||Surface acoustic wave devices||Smart electronics for piezoelectric devices and systems||Piezoelectric energy harvesting||Packaging of piezoelectric MEMS||Simulation and modeling of piezoelectric MEMS
UR  - http://www.mdpi.com/books/pdfview/book/672
ER  -