TY  - BOOK
AU  - Verd, Jaume||Segura, Jaume
TI  - Development of CMOS-MEMS/NEMS Devices
KW  - encapsulation||n/a||NEM memory switch||magnetotransistor||gas sensor||nano-system array||metal oxide (MOX) sensor||capacitive pressure sensor||real-time temperature compensation loop||mechanical relays||single-crystal silicon (SC-Si)||MEMS relays||MEMS||oscillator||micro-electro-mechanical system (MEMS)||uncooled IR-bolometer||microelectromechanical systems||microbolometer||programmable sustaining amplifier||micro sensor||CMOS-MEMS||pierce oscillator||MEMS resonators||micro/nanoelectromechanical systems (MEMS/NEMS)||resonator||microhotplate||NEMS||application-specific integrated circuit (ASIC)||MEMS modelling||magnetic field||chopper instrumentation amplifier||microresonators||interface circuit||Hall effect||thermal detector||temperature sensor||infrared sensor||CMOS–NEMS||CMOS||atomic force microscope||MEMS switches||stent||micro-electro-mechanical systems (MEMS) sensors||nano resonator||silicon-on-insulator (SOI)||MEMS-ASIC integration||Sigma-Delta||MEMS characterization||high-Q capacitive accelerometer||mass sensors||M3D
UR  - https://mdpi.com/books/pdfview/book/1387
ER  -