TY  - BOOK
AU  - Romano, Lucia
TI  - Micro- and Nano-Fabrication by Metal Assisted Chemical Etching
KW  - porous silicon||Pd nanoparticles-assisted chemical etching||etching rate||ethanol electrooxidation||X-ray diffractive optics||zone plate||high aspect ratio nanostructures||metal-assisted chemical etching||electroless deposition||Al2O3 nanotube||ultra-high aspect ratio||gold (Au) metal assisted chemical etching||atomic layer deposition||anisotropic dry etching||silicon cones||metal assisted chemical etching||transversal pores||antireflection||black GaAs||photon recycling||X-ray grating interferometry||catalyst||silicon||gold electroplating||magnetically guided metal-assisted chemical etching||bulk Si etching||curved Si structure||catalyst encapsulation||n/a
UR  - https://mdpi.com/books/pdfview/book/3301
ER  -