Zhang, Dan <br/><br/>
Advanced mechatronics and MEMS devices II 

 - Switzerland,  Springer International Publishing,  2017. 
 - xvii,718. 
<br/><br/><label>ISBN: </label>9783319321783 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microsystems<br/>Nanosystems
<br/><br/><label>Dewey Class. No.: </label>621.381  / ZHA/A