TY  - BOOK
AU  - Zhang, Dan
AU  - 
TI  - Advanced mechatronics and MEMS devices II
SN  - 9783319321783
U1  - 621.381 
PY  - 2017///
CY  - Switzerland
PB  - Springer International Publishing
KW  - Microsystems
KW  - Nanosystems
ER  -