TY  - BOOK
AU  - Wang,Shengkai
AU  - Wang,Xiaolei
TI  - MOS interface physics, process and characterization
SN  - 9781032106274
U1  - 621.381 WAN/M 
PY  - 2022///
CY  - Boca Raton
PB  - CRC Press
KW  - Metal oxide semiconductors
KW  - Design and construction
KW  - Mathematics
KW  - Semiconductors
KW  - Junctions
KW  - Integrated circuits
KW  - Research
KW  - Solid state physics
KW  - Experiments
N1  - Includes bibliographical references
N2  - "The electronic device based on Metal Oxide Semiconductor (MOS) structure is the most important component of a large-scale integrated circuit and the key to achieving high performance devices and integrated circuits is high quality MOS structure. This book contains abundant experimental examples focusing on MOS structure. The volume will be an essential reference for academics and postgraduates within the field of microelectronics"--
ER  -