| 000 | 00463nam a2200121Ia 4500 | ||
|---|---|---|---|
| 008 | 220615s9999||||xx |||||||||||||| ||und|| | ||
| 100 | _aSiva Yellampalli | ||
| 245 | 0 | _aMEMS Sensors - Design and Application | |
| 546 | _aEnglish[eng] | ||
| 650 | _aEngineering||Physical Sciences||Engineering and Technology||Electrical and Electronic Engineering||Electronic Circuits | ||
| 856 | _uhttps://www.intechopen.com/books/mems-sensors-design-and-application | ||
| 942 | _cEB | ||
| 999 |
_c14070 _d14070 |
||