000 00463nam a2200121Ia 4500
008 220615s9999||||xx |||||||||||||| ||und||
100 _aSiva Yellampalli
245 0 _aMEMS Sensors - Design and Application
546 _aEnglish[eng]
650 _aEngineering||Physical Sciences||Engineering and Technology||Electrical and Electronic Engineering||Electronic Circuits
856 _uhttps://www.intechopen.com/books/mems-sensors-design-and-application
942 _cEB
999 _c14070
_d14070