| 000 | 00606nam a2200121Ia 4500 | ||
|---|---|---|---|
| 008 | 220615s9999||||xx |||||||||||||| ||und|| | ||
| 100 | _aUlrich Schmid (Ed.)||Michael Schneider (Ed.) | ||
| 245 | 0 | _aPiezoelectric MEMS | |
| 546 | _aEnglish[eng] | ||
| 650 | _aPiezoelectric MEMS resonators||Piezoelectric materials||Acoustic MEMS devices||Surface acoustic wave devices||Smart electronics for piezoelectric devices and systems||Piezoelectric energy harvesting||Packaging of piezoelectric MEMS||Simulation and modeling of piezoelectric MEMS | ||
| 856 | _uhttp://www.mdpi.com/books/pdfview/book/672 | ||
| 942 | _cEB | ||
| 999 |
_c15305 _d15305 |
||