| 000 | 00530nam a2200121Ia 4500 | ||
|---|---|---|---|
| 008 | 220616s9999||||xx |||||||||||||| ||und|| | ||
| 100 | _aJagannathan Thirumalai | ||
| 245 | 0 | _aMicro/Nanolithography - A Heuristic Aspect on the Enduring Technology | |
| 546 | _aEnglish[eng] | ||
| 650 | _aEngineering||Physical Sciences||Engineering and Technology||Electrical and Electronic Engineering||Nano Electronics | ||
| 856 | _uhttps://www.intechopen.com/books/micro-nanolithography-a-heuristic-aspect-on-the-enduring-technology | ||
| 942 | _cEB | ||
| 999 |
_c20444 _d20444 |
||