000			01003nam a2200121Ia 4500
008			220620s9999||||xx |||||||||||||| ||und||
245		0	_aMicro- and Nano-Fabrication by Metal Assisted Chemical Etching
546			_aEnglish[eng]
650			_aporous silicon||Pd nanoparticles-assisted chemical etching||etching rate||ethanol electrooxidation||X-ray diffractive optics||zone plate||high aspect ratio nanostructures||metal-assisted chemical etching||electroless deposition||Al2O3 nanotube||ultra-high aspect ratio||gold (Au) metal assisted chemical etching||atomic layer deposition||anisotropic dry etching||silicon cones||metal assisted chemical etching||transversal pores||antireflection||black GaAs||photon recycling||X-ray grating interferometry||catalyst||silicon||gold electroplating||magnetically guided metal-assisted chemical etching||bulk Si etching||curved Si structure||catalyst encapsulation||n/a
700			_aRomano, Lucia
856			_uhttps://mdpi.com/books/pdfview/book/3301
942			_cEB
999			_c21862 _d21862