| 000 | 00404nam a2200121Ia 4500 | ||
|---|---|---|---|
| 008 | 220620s9999||||xx |||||||||||||| ||und|| | ||
| 245 | 0 | _aUpdates in Advanced Lithography | |
| 546 | _aEnglish[eng] | ||
| 650 | _aCondensed matter physics (liquid state & solid state physics) | ||
| 700 | _aHosaka, Sumio | ||
| 856 | _uhttps://mts.intechopen.com/storage/books/3071/authors_book/authors_book.pdf | ||
| 942 | _cEB | ||
| 999 |
_c25480 _d25480 |
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