000			01639nam a2200121Ia 4500
008			220620s9999||||xx |||||||||||||| ||und||
100			_aZamkotsian, Frederic||Xie, Huikai
245		0	_aOptical MEMS
546			_aEnglish[eng]
650			_astray light||input shaping||n/a||wavefront sensing||signal-to-noise ratio (SNR)||LC micro-lenses controlled electrically||infrared||intraoperative microscope||MEMS mirror||MLSSP||ocular aberrations||MEMS scanning micromirror||electrothermal actuation||electrothermal bimorph||open-loop control||wavelength dependent loss (WDL)||NIR fluorescence||infrared Fabry–Perot (FP) filtering||two-photon||resonant MEMS scanner||residual oscillation||3D measurement||parametric resonance||digital micromirror device||quality map||metalens||flame retardant 4 (FR4)||angle sensor||optical switch||metasurface||vibration noise||optical coherence tomography||spectrometer||reliability||quasistatic actuation||Huygens’ metalens||confocal||large reflection variations||electrostatic||dual-mode liquid-crystal (LC) device||field of view (FOV)||scanning micromirror||fluorescence confocal||variable optical attenuator (VOA)||micro-electro-mechanical systems (MEMS)||microscanner||laser stripe width||polarization dependent loss (PDL)||fringe projection||2D Lissajous||usable scan range||laser stripe scanning||bio-optical imaging||MEMS scanning mirror||digital micromirror device (DMD)||Cu/W bimorph||echelle grating||achromatic||DMD chip||tunable fiber laser||programmable spectral filter||higher-order modes||electromagnetic actuator
856			_uhttps://mdpi.com/books/pdfview/book/1477
942			_cEB
999			_c27102 _d27102